Heater
This product is designed for use in Thin Film (TF) processes, which require exceptional planarity and cleanliness. Its superior temperature control capabilities directly impact and optimize thin film deposition.
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Product Features
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Product Features
High Temperature Uniformity
T±(0.5~1)%
Electron Beam Welding, Vacuum Brazing, Precision Machining
Specialty Coating
Fluoride Film Layer
First domestic component supplier with this coating capability
High Cleanliness
(Particle@0.2um<15ea/cm2)
